JPH0439770B2 - - Google Patents

Info

Publication number
JPH0439770B2
JPH0439770B2 JP58055322A JP5532283A JPH0439770B2 JP H0439770 B2 JPH0439770 B2 JP H0439770B2 JP 58055322 A JP58055322 A JP 58055322A JP 5532283 A JP5532283 A JP 5532283A JP H0439770 B2 JPH0439770 B2 JP H0439770B2
Authority
JP
Japan
Prior art keywords
mos
fet
region
type
base region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58055322A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58212168A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS58212168A publication Critical patent/JPS58212168A/ja
Publication of JPH0439770B2 publication Critical patent/JPH0439770B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/84—Combinations of enhancement-mode IGFETs and depletion-mode IGFETs
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/567—Circuits characterised by the use of more than one type of semiconductor device, e.g. BIMOS, composite devices such as IGBT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00—Thyristors
    • H10D18/40—Thyristors with turn-on by field effect 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00—Thyristors
    • H10D18/60—Gate-turn-off devices 
    • H10D18/65—Gate-turn-off devices  with turn-off by field effect 
    • H10D18/655—Gate-turn-off devices  with turn-off by field effect  produced by insulated gate structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101—Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/121—BJTs having built-in components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs
    • H10D84/403—Combinations of FETs or IGBTs with BJTs and with one or more of diodes, resistors or capacitors
    • H10D84/406—Combinations of FETs or IGBTs with vertical BJTs and with one or more of diodes, resistors or capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85—Complementary IGFETs, e.g. CMOS

Landscapes

  • Thyristors (AREA)
  • Bipolar Transistors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP58055322A 1982-04-01 1983-04-01 Ｍｏｓ―ｆｅｔゲート形サイリスタ集積素子 Granted JPS58212168A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/364,294 US5014102A (en) 1982-04-01 1982-04-01 MOSFET-gated bipolar transistors and thyristors with both turn-on and turn-off capability having single-polarity gate input signal
US364294 1989-06-12

Publications (2)

Publication Number Publication Date
JPS58212168A JPS58212168A (ja) 1983-12-09
JPH0439770B2 true JPH0439770B2 (en]) 1992-06-30

Family

ID=23433874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58055322A Granted JPS58212168A (ja) 1982-04-01 1983-04-01 Ｍｏｓ―ｆｅｔゲート形サイリスタ集積素子

Country Status (3)

Country Link
US (1) US5014102A (en])
JP (1) JPS58212168A (en])
FR (1) FR2524711B1 (en])

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049650U (ja) * 1983-09-14 1985-04-08 関西日本電気株式会社 半導体装置
US4611235A (en) * 1984-06-04 1986-09-09 General Motors Corporation Thyristor with turn-off FET
DE3583897D1 (de) * 1984-06-22 1991-10-02 Hitachi Ltd Halbleiterschalter.
GB2164790A (en) * 1984-09-19 1986-03-26 Philips Electronic Associated Merged bipolar and field effect transistors
DE3435550A1 (de) * 1984-09-27 1986-04-03 Siemens AG, 1000 Berlin und 8000 München Thyristor mit erhoehter di/dt-festigkeit
JPS61180472A (ja) * 1985-02-05 1986-08-13 Mitsubishi Electric Corp 半導体装置
US4760431A (en) * 1985-09-30 1988-07-26 Kabushiki Kaisha Toshiba Gate turn-off thyristor with independent turn-on/off controlling transistors
GB2190539A (en) * 1986-05-16 1987-11-18 Philips Electronic Associated Semiconductor devices
US4786958A (en) * 1986-11-17 1988-11-22 General Motors Corporation Lateral dual gate thyristor and method of fabricating same
JPH0821713B2 (ja) * 1987-02-26 1996-03-04 株式会社東芝 導電変調型ｍｏｓｆｅｔ
EP0313000B1 (de) * 1987-10-21 1998-05-06 Siemens Aktiengesellschaft Verfahren zum Herstellen eines Bipolartransistors mit isolierter Gateelektrode
US4861731A (en) * 1988-02-02 1989-08-29 General Motors Corporation Method of fabricating a lateral dual gate thyristor
GB8914554D0 (en) * 1989-06-24 1989-08-16 Lucas Ind Plc Semiconductor device
JPH0795597B2 (ja) * 1990-08-18 1995-10-11 三菱電機株式会社 サイリスタおよびその製造方法
US5204541A (en) * 1991-06-28 1993-04-20 Texas Instruments Incorporated Gated thyristor and process for its simultaneous fabrication with high- and low-voltage semiconductor devices
DE4126491A1 (de) * 1991-08-10 1993-02-11 Asea Brown Boveri Abschaltbares leistungshalbleiter-bauelement
US5260590A (en) * 1991-12-23 1993-11-09 Harris Corp. Field effect transistor controlled thyristor having improved turn-on characteristics
EP0555047B1 (en) * 1992-02-03 1997-05-14 Fuji Electric Co., Ltd. Semiconductor gated switching device
US5459339A (en) * 1992-02-03 1995-10-17 Fuji Electric Co., Ltd. Double gate semiconductor device and control device thereof
US5294816A (en) * 1992-06-10 1994-03-15 North Carolina State University At Raleigh Unit cell arrangement for emitter switched thyristor with base resistance control
US5198687A (en) * 1992-07-23 1993-03-30 Baliga Bantval J Base resistance controlled thyristor with single-polarity turn-on and turn-off control
US5293054A (en) * 1992-11-23 1994-03-08 North Carolina State University At Raleigh Emitter switched thyristor without parasitic thyristor latch-up susceptibility
US5241194A (en) * 1992-12-14 1993-08-31 North Carolina State University At Raleigh Base resistance controlled thyristor with integrated single-polarity gate control
US5306930A (en) * 1992-12-14 1994-04-26 North Carolina State University At Raleigh Emitter switched thyristor with buried dielectric layer
US5396087A (en) * 1992-12-14 1995-03-07 North Carolina State University Insulated gate bipolar transistor with reduced susceptibility to parasitic latch-up
US5412228A (en) * 1994-02-10 1995-05-02 North Carolina State University Multifunctional semiconductor switching device having gate-controlled regenerative and non-regenerative conduction modes, and method of operating same
US5488236A (en) * 1994-05-26 1996-01-30 North Carolina State University Latch-up resistant bipolar transistor with trench IGFET and buried collector
US5471075A (en) * 1994-05-26 1995-11-28 North Carolina State University Dual-channel emitter switched thyristor with trench gate
DE19534388B4 (de) * 1994-09-19 2009-03-19 International Rectifier Corp., El Segundo IGBT-Transistorbauteil
US5493134A (en) * 1994-11-14 1996-02-20 North Carolina State University Bidirectional AC switching device with MOS-gated turn-on and turn-off control
JP3298385B2 (ja) * 1995-04-05 2002-07-02 富士電機株式会社 絶縁ゲート型サイリスタ
SE9601179D0 (sv) * 1996-03-27 1996-03-27 Abb Research Ltd A field controlled semiconductor device of SiC and a method for production thereof
FR2754392B1 (fr) * 1996-10-04 1999-04-30 Centre Nat Rech Scient Thyristor dual normalement passant blocable par une impulsion appliquee sur la gachette
US5969378A (en) * 1997-06-12 1999-10-19 Cree Research, Inc. Latch-up free power UMOS-bipolar transistor
US6121633A (en) * 1997-06-12 2000-09-19 Cree Research, Inc. Latch-up free power MOS-bipolar transistor
WO1999056323A1 (en) * 1998-04-27 1999-11-04 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and process for manufacturing the same
US6873202B1 (en) * 2003-10-20 2005-03-29 Maryland Semiconductor, Inc. Adaptive MOSFET resistor
US7775995B2 (en) * 2006-01-31 2010-08-17 Tissue Regeneration Technologies LLC Device for the generation of shock waves utilizing a thyristor
US9331068B2 (en) 2013-10-30 2016-05-03 United Silicon Carbide, Inc. Hybrid wide-bandgap semiconductor bipolar switches
US9148139B2 (en) 2014-01-13 2015-09-29 United Silicon Carbide, Inc. Monolithically integrated cascode switches

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836975B1 (en]) * 1967-12-06 1973-11-08
US4066917A (en) * 1976-05-03 1978-01-03 National Semiconductor Corporation Circuit combining bipolar transistor and JFET's to produce a constant voltage characteristic
JPS5387187A (en) * 1977-01-12 1978-08-01 Hitachi Ltd Semiconductor driving circuit
US4199774A (en) * 1978-09-18 1980-04-22 The Board Of Trustees Of The Leland Stanford Junior University Monolithic semiconductor switching device
DE2945324A1 (de) * 1979-11-09 1981-05-21 Siemens AG, 1000 Berlin und 8000 München Thyristor mit verbessertem schaltverhalten
DE2945366A1 (de) * 1979-11-09 1981-05-14 Siemens AG, 1000 Berlin und 8000 München Thyristor mit steuerbaren emitter-kurzschluessen
US4356416A (en) * 1980-07-17 1982-10-26 General Electric Company Voltage controlled non-saturating semiconductor switch and voltage converter circuit employing same
FR2505102B1 (fr) * 1981-04-29 1986-01-24 Radiotechnique Compelec Amplificateur de type darlington forme d'un transistor a effet de champ et d'un transistor bipolaire, et sa realisation en structure semi-conductrice integree
JPS57186833A (en) * 1981-05-13 1982-11-17 Hitachi Ltd Switching element

Also Published As

Publication number Publication date
US5014102A (en) 1991-05-07
FR2524711A1 (fr) 1983-10-07
FR2524711B1 (fr) 1986-03-14
JPS58212168A (ja) 1983-12-09

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